JPH0217286U - - Google Patents
Info
- Publication number
- JPH0217286U JPH0217286U JP9467988U JP9467988U JPH0217286U JP H0217286 U JPH0217286 U JP H0217286U JP 9467988 U JP9467988 U JP 9467988U JP 9467988 U JP9467988 U JP 9467988U JP H0217286 U JPH0217286 U JP H0217286U
- Authority
- JP
- Japan
- Prior art keywords
- clean unit
- main body
- back wall
- unit main
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000009423 ventilation Methods 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988094679U JPH07225Y2 (ja) | 1988-07-18 | 1988-07-18 | クリーンユニット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988094679U JPH07225Y2 (ja) | 1988-07-18 | 1988-07-18 | クリーンユニット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0217286U true JPH0217286U (en]) | 1990-02-05 |
| JPH07225Y2 JPH07225Y2 (ja) | 1995-01-11 |
Family
ID=31319246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988094679U Expired - Lifetime JPH07225Y2 (ja) | 1988-07-18 | 1988-07-18 | クリーンユニット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07225Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0397138U (en]) * | 1990-01-18 | 1991-10-04 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613345U (ja) * | 1984-06-14 | 1986-01-10 | 日本バイリーン株式会社 | 空気清浄装置 |
-
1988
- 1988-07-18 JP JP1988094679U patent/JPH07225Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613345U (ja) * | 1984-06-14 | 1986-01-10 | 日本バイリーン株式会社 | 空気清浄装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0397138U (en]) * | 1990-01-18 | 1991-10-04 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07225Y2 (ja) | 1995-01-11 |